High transmittance from 0.18–3.5 μm, with >90% transmission in the visible range.
High laser damage resistance: Withstands prolonged ArF excimer laser irradiation (193 nm) without degradation, maintaining high transmittance near the vacuum ultraviolet absorption edge.
Radiation resistance: High-purity grades remain clear and maintain low energy absorption even after gamma-ray irradiation up to 31 MGy, suitable for space and nuclear environments.
Optically isotropic (Z-cut): Z-cut quartz is non-birefringent at normal incidence, preserving beam polarization without altering light path.
Insoluble in water and chemically stable: Excellent environmental durability, with low thermal expansion and high chemical resistance.
Natural optical activity: Rotates plane-polarized light, enabling polarization control applications.
Typical Specifications
Chemical formula: SiO₂
Crystal structure: Trigonal, space group P3₁21 (right-handed) or P3₂21 (left-handed); α-quartz
Phase transition temperature: 573 °C
Transparency range: 0.18–3.5 μm (useful); extended transmission >50 μm in the terahertz region
Available cuts: Z-cut, X-cut, Y-cut, AT-cut, and others
Main Applications
Waveplates and polarization optics: Quarter-wave and half-wave plates for polarization control; Z-cut quartz preserves polarization while providing retardation.
UV/VUV windows and prisms: Spectrometer prisms for UV measurement; optical components for ArF excimer laser systems (193 nm) and other deep-UV applications.
Laser windows and substrates: High-damage-threshold windows for high-power laser systems; substrates for X-ray monochromators.
Terahertz optics: Z-cut quartz windows for THz blackbody emission above 50 μm.
Radiation-environment optics: Windows and components for space cameras, nuclear facilities, and satellite systems.
Frequency control and timing devices: Piezoelectric substrates for SAW devices, crystal oscillators, and filters.